JPH0353786B2 - - Google Patents

Info

Publication number
JPH0353786B2
JPH0353786B2 JP60027843A JP2784385A JPH0353786B2 JP H0353786 B2 JPH0353786 B2 JP H0353786B2 JP 60027843 A JP60027843 A JP 60027843A JP 2784385 A JP2784385 A JP 2784385A JP H0353786 B2 JPH0353786 B2 JP H0353786B2
Authority
JP
Japan
Prior art keywords
node
substrate
buried
flip
diffusion layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60027843A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61187362A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP60027843A priority Critical patent/JPS61187362A/ja
Priority to US06/829,897 priority patent/US4780751A/en
Publication of JPS61187362A publication Critical patent/JPS61187362A/ja
Publication of JPH0353786B2 publication Critical patent/JPH0353786B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B10/00—Static random access memory [SRAM] devices
    • H10B10/15—Static random access memory [SRAM] devices comprising a resistor load element
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B10/00—Static random access memory [SRAM] devices
    • H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element

Landscapes

  • Semiconductor Memories (AREA)
JP60027843A 1985-02-15 1985-02-15 半導体集積回路装置 Granted JPS61187362A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60027843A JPS61187362A (ja) 1985-02-15 1985-02-15 半導体集積回路装置
US06/829,897 US4780751A (en) 1985-02-15 1986-02-18 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60027843A JPS61187362A (ja) 1985-02-15 1985-02-15 半導体集積回路装置

Publications (2)

Publication Number Publication Date
JPS61187362A JPS61187362A (ja) 1986-08-21
JPH0353786B2 true JPH0353786B2 (en]) 1991-08-16

Family

ID=12232196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60027843A Granted JPS61187362A (ja) 1985-02-15 1985-02-15 半導体集積回路装置

Country Status (2)

Country Link
US (1) US4780751A (en])
JP (1) JPS61187362A (en])

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5293563A (en) * 1988-12-29 1994-03-08 Sharp Kabushiki Kaisha Multi-level memory cell with increased read-out margin
US5219779A (en) * 1989-05-11 1993-06-15 Sharp Kabushiki Kaisha Memory cell for dynamic random access memory
JP3214004B2 (ja) * 1991-12-17 2001-10-02 ソニー株式会社 半導体メモリ装置及びその製法
JPH0766671B2 (ja) * 1992-12-09 1995-07-19 宮城工業高等専門学校長 多値置数電子装置
KR100305123B1 (ko) * 1992-12-11 2001-11-22 비센트 비.인그라시아, 알크 엠 아헨 정적랜덤액세스메모리셀및이를포함하는반도체장치
US5452246A (en) * 1993-06-02 1995-09-19 Fujitsu Limited Static semiconductor memory device adapted for stabilization of low-voltage operation and reduction in cell size
US5572460A (en) * 1993-10-26 1996-11-05 Integrated Device Technology, Inc. Static random-access memory cell with capacitive coupling to reduce sensitivity to radiation
JP2601176B2 (ja) * 1993-12-22 1997-04-16 日本電気株式会社 半導体記憶装置
US5861652A (en) * 1996-03-28 1999-01-19 Symbios, Inc. Method and apparatus for protecting functions imbedded within an integrated circuit from reverse engineering
US5700707A (en) * 1996-06-13 1997-12-23 Chartered Semiconductor Manufacturing Pte Ltd. Method of manufacturing SRAM cell structure having a tunnel oxide capacitor
US5886921A (en) * 1996-12-09 1999-03-23 Motorola, Inc. Static random access memory cell having graded channel metal oxide semiconductor transistors and method of operation
US6489952B1 (en) * 1998-11-17 2002-12-03 Semiconductor Energy Laboratory Co., Ltd. Active matrix type semiconductor display device
AU2001286206A1 (en) 2000-09-13 2002-03-26 Teijin Limited Thick and thin polyester multifilament yarn
US6366493B1 (en) * 2000-10-24 2002-04-02 United Microelectronics Corp. Four transistors static-random-access-memory cell

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644194A (en) * 1979-09-19 1981-04-23 Toshiba Corp Memory device
JPH0636423B2 (ja) * 1982-06-22 1994-05-11 株式会社日立製作所 三次元構造半導体装置
US4488348A (en) * 1983-06-15 1984-12-18 Hewlett-Packard Company Method for making a self-aligned vertically stacked gate MOS device
US4656731A (en) * 1985-08-05 1987-04-14 Texas Instruments Incorporated Method for fabricating stacked CMOS transistors with a self-aligned silicide process

Also Published As

Publication number Publication date
US4780751A (en) 1988-10-25
JPS61187362A (ja) 1986-08-21

Similar Documents

Publication Publication Date Title
US5317178A (en) Offset dual gate thin film field effect transistor
JP3057661B2 (ja) 半導体装置
JP2950558B2 (ja) 半導体装置
US6613634B2 (en) Method of manufacturing a semiconductor device using oblique ion injection
KR940002772B1 (ko) 반도체 집적회로 장치 및 그 제조방법
US5691559A (en) Semiconductor devices with load elements
JPH0353786B2 (en])
US5012443A (en) Semiconductor static ram including load resistors formed on different layers
JPS61292951A (ja) 半導体集積回路装置の製法
KR100282169B1 (ko) 전원배선에 평형한 데이터선을 가진 스태틱 반도체 메모리 장치
JP2825244B2 (ja) 半導体装置
KR100377082B1 (ko) 반도체 장치
JP2689923B2 (ja) 半導体装置およびその製造方法
JPH0640573B2 (ja) 半導体集積回路装置
JPH02246264A (ja) 半導体装置およびその製造方法
JP2550119B2 (ja) 半導体記憶装置
JP3075930B2 (ja) 半導体メモリ装置
US5598020A (en) Semiconductor integrated circuit device and method of manufacturing the same
JP2877069B2 (ja) スタティック型半導体メモリ装置
JPH1167932A (ja) 半導体集積回路装置の製造方法
JPH0653442A (ja) Ｓｒａｍメモリーセル構造
JP2515033B2 (ja) 半導体スタティックメモリ装置の製造方法
JPS61140171A (ja) 半導体記憶装置
JPS62169475A (ja) 半導体記憶装置
KR100557930B1 (ko) 반도체 소자의 콘택 구조 및 그 형성방법